Photolithography
Tamarack Scientific’s Projection Scanners, Proximity/Contact Mask Aligners and UV Light Sources are proven to be cost-effective in a wide variety of high-yield manufacturing applications, including advanced packaging, LEDs, photovoltaics and MEMS. With 40 years of experience as a pioneer in optics technology, Tamarack photolithography systems offer significant advantages over competitive systems in critical areas including resolution, accuracy, yield, throughput and cost of ownership.
Projection Scanners
Tamarack’s UV projection scanners are engineered for high throughput, maximum yield and low cost of ownership. Image resolution to sub-3 microns, and outstanding depth of focus ensures superior imaging in ultra-thick resists. These advantages when coupled with sub-micron alignment accuracy, makes these scanners unique in their ability to accurately expose large substrates.
Proximity Mask Aligner
Tamarack’s mask aligners provide the highest resolution obtainable in a proximity/contact UV exposure system, with resolution to 1 um in dry film resists. Their unique imaging capabilities permit precise feature replication over an entire exposure area, resulting in exceptionally high yields. Proximity gapping (separation between the mask and the substrate) can be varied to accommodate various process applications. These aligners are designed to transfer the full image of the mask in a single exposure, thus maintaining high throughput levels. Precise image transfer is assured with Tamarack’s large area collimated light sources.
Collimated UV Source
Tamarack Scientific has been manufacturing collimated UV light sources for applications in R&D labs or on production lines for over 30 years. PRX lamps provide superior output power in a collimated light beam of up to 12” x 12”, with a uniformity of +/- .6% in a tabletop system. An integrated shutter timer supplies the exact amount of energy needed for each process.
For more information, or to discuss your photolithography system specifications in strict confidentiality, please contact us. Our knowledgeable staff of scientists and engineers can help you customize a solution suited to your needs.