Processing Methods
Tamarack Scientific manufactures a range of laser processing and photolithography systems for ablating, exposing, annealing and/or de-bonding a wide variety of materials.
Laser Ablate
Laser ablation is the process of removing material from a surface by irradiating it with a laser beam, which heats the material and sublimates or evaporates the surface layers in a controlled manner. Tamarack’s laser systems ablate micro vias, trenches, pockets, scribes, patterns and full cuts utilizing Excimer and Solid State lasers. With their large output beam and high UV power, excimer lasers (308 & 248nm) are ideally suited for ablating dense and/or intricate patterns. With their small directed beam, solid state lasers (266, 355, 532 and 1064nm) are best suited for ablating low volumes of material such as scribes, cuts and sparsely populated vias.
Product links:
- M420 Series of Excimer Laser Steppers
- M440 Series of Excimer Line Beam Systems
- M500 Series of R2R Excimer Laser Systems
- M800 Series of Solid State Laser Systems
Expose
Depending upon the process requirements, Tamarack Scientific’s exposure systems utilize a high-power mercury arc lamp, an excimer laser or a solid state laser for masked or maskless, projection or contact proximity. Tamarack’s projection optics with large DOF allow for processing thick resists with high aspect ratios without substrate contact.
Product links:
- M336 Gen2 300mm Projection Scanner
- M304 Large Area Projection Scanner
- M152 Mask Aligner
- M420 Series of Excimer Laser Steppers
- PRX UV Light Source
De-bond
Laser de-bonding involves the laser lift-off (LLO) of layers of material to change the thermal and/or electrical properties of a substrate and/or adhesive layer. Tamarack provides de-bonding solutions which utilize excimer or solid state lasers.
Product links:
Anneal
Annealing occurs by the diffusion of atoms within a solid material, which redistributes and destroys the dislocations in materials such as metals and ceramics. The result is an increase in the ductility of the material. Tamarack provides annealing systems which utilize excimer or solid state lasers.
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