Technical papers

Application Note: Excimer Laser Ablation of Thin Film Metal on Insulating Flexible Substrates.
(PDF: 96K / 6 pages)


Brief Description Of Excimer Laser Micromachining
(PDF: 27K / 1 page)


Scanning Projection Lithography for Large Area Substrates
(PDF: 23K / 3 pages)

Scanning Projection For Large Area Lithography
Reprinted from Spring 1996, MICROLITHOGRAPHY WORLD.
Copyright 1996, PennWell Publishing Co.
For a printed copy contact PennWell or Tamarack.
(PDF: 69K / 3 pages)

Material Removal Rates of Biocompatible Polymers During Laser Ablation
(PDF: 31K / 7 pages)

Excimer ablation of ITO on flexible substrates for large format display applications.
(PDF: 272K / 12 pages)


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