MEMS
Micro-Electro-Mechanical Systems (MEMS) technology utilizes micro-fabrication techniques to combine mechanical elements, sensors, actuators, and electronics on a common silicon substrate. MEMS devices generally range in size from 20um up to a millimeter, and contain components between 1 to 100um in size. MEMS are fabricated by micromachining to selectively etch away parts of a silicon wafer, and then adding new layers which form the mechanical and electromechanical devices. MEMS combine the computational ability of microelectronics with the perception and control capabilities of micro-sensors and micro-actuators, and are commonly used for pressure, temperature, chemical and vibration sensors, switches and light reflectors, accelerometers and gyroscopes.
The design, engineering and manufacturing of these devices requires precise equipment that maintains high yield with minimal defects, while maintaining a low total cost of ownership that supports production cost control. Tamarack Scientific’s photolithography, excimer and solid state laser systems provide advanced support for accurate, high throughput, cost-effective fabrication of complex 2-D and 3-D structures including MEMS devices.
For more information on how specific systems may suit your requirements, please review these product links:
- M336 Projection Scanner – for exposing
- M420 Series of Excimer Laser Steppers – for ablating & exposing
- M500 Series of R2R Excimer Laser Systems – for ablating & exposing
- M800 Series of Solid State Laser Systems – for ablating & exposing
- M152 Mask Aligner – for exposing
If you have further questions, or if you wish to discuss your MEMS application in strict confidentiality, please contact one of our sales engineers. We are dedicated to helping you implement the best solution for your needs.