Flat Panel Display
Manufacturing
Flat panel displays are manufactured using a variety of technologies generally categorized as emissive, transmissive or reflective. The common challenge is to produce large area arrays of pixels (the size of one full display) that are free of both functional and appearance defects. In response to display size and resolution increases, lithography tools have followed the semiconductor path from contact to proximity and then projection configurations, with the added requirements of uniform exposure over a large area, and the ability to image over non planarized surfaces.
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Tamarack offers two approaches suitable for imaging display components across technologies, including color filters, FEDs, OLEDs, electroluminescent, LCDs, and plasma. They are:
- Collimated Proximity Aligners
- Projection Scanners
These are full field exposure tools with accurate global alignment capability, broadband UV illumination sources, and available substrate automation.
Tamarack’s proximity aligners offer true non contact imaging, using collimated light and pattern recognition automatic alignment. Imaging areas can be up to 450 x 450 mm.
The projection scanner was introduced by Tamarack in the early 90s. Since then, we have developed it into a flexible modular unit that combines the benefits of a broadband telecentric projection lens, advanced through the lens pattern recognition alignment system, and accurate computer controlled motion systems to image down to 4 microns on substrates up to 840 x 1025 mm.
